Comprehensive Study of Improved Negative-Bias-Illumination-Temperature Stress Stability in Terbium-Doped Indium-Zinc-Oxide Thin-Film Transistors

作者：Liu, Jingdong; Xu, Hua; Li, Min; Xu, Miao^*; Peng, Junbiao

来源：IEEE Transactions on Electron Devices, 2023, 70(7): 3563-3568.

DOI：10.1109/TED.2023.3273511

• Negative bias illumination temperature stress
• terbium (Tb) doping
• thin-film transistor (TFT)

this study, the explanation of the enhanced negative-bias-illumination-temperature stress stability (NBITS) of indium-zinc-oxide thin-film transistors (IZO TFTs) under terbium (Tb) doping is addressed. The acquired Tb-IZO TFTs exhibit enhanced stability compared with pristine device (AVth after NBITS decreased from-4.1 to -0.6 V). Hall measurements, X-ray photoelectron spectroscopy, and microwave photoconductivity decay were used to analyze the impact of Tb doping on the characteristics of metal- oxide-semiconductor films. It is believed that Tb-induced shallow defects may serve as the recombination centers for capturing photo-generated electrons, which is an essential complement to the trap-assisted model. The optimized Tb content is considered to be 3.21 at.%, with a mobility of 20.0 cm(2)/V.s, ION/IOFF ratio of 10(9), and an NBITS of -0.8 V.