High-Throughput Two-Photon 3D Printing Enabled by Holographic Multi-Foci High-Speed Scanning

作者：Zhang, Leran; Wang, Chaowei^*; Zhang, Chenchu; Xue, Yuhang; Ye, Zhaohui; Xu, Liqun; Hu, Yanlei; Li, Jiawen; Chu, Jiaru; Wu, Dong^*

来源：Nano Letters, 2024, 24(8): 2671-2679.

DOI：10.1021/acs.nanolett.4c00505

• femtosecond laser
• high-throughput 3D printing
• holographic multifoci
• parallel processing
• functionalmicrostructure

The emerging two-photon polymerization (TPP) technique enables high-resolution printing of complex 3D structures, revolutionizing micro/nano additive manufacturing. Various fast scanning and parallel processing strategies have been proposed to promote its efficiency. However, obtaining large numbers of uniform focal spots for parallel high-speed scanning remains challenging, which hampers the realization of higher throughput. We report a TPP printing platform that combines galvanometric mirrors and liquid crystal on silicon spatial light modulator (LCoS-SLM). By setting the target light field at LCoS-SLM's diffraction center, sufficient energy is acquired to support simultaneous polymerization of over 400 foci. With fast scanning, the maximum printing speed achieves 1.49 x 10(8) voxels s(-1), surpassing the existing scanning-based TPP methods while maintaining high printing resolution and flexibility. To demonstrate the processing capability, functional 3D microstructure arrays are rapidly fabricated and applied in micro-optics and micro-object manipulation. Our method may expand the prospects of TPP in large-scale micro/nanomanufacturing.

• 单位
  中国科学院