Nanofluidic chip on tube as standard leak elements

作者：Lin, Wenyu; Zhang, Huzhong; Xi, Zhenhua; Bi, Hailin; Luo, Yan; Wang, Kuibo; Cao, Qing^*; Wang, Xudi^*; Wu, Xiaobin^*

来源：MEASUREMENT, 2022, 187: 110343.

DOI：10.1016/j.measurement.2021.110343

• Standard leak
• Nanofluidic chip
• Macro-micro connection
• Hermeticity testing
• Conductance measurement
• Micro gas flow

The nanofluidic chips with channels of 100-nm depth and 3-mu m width were employed as molecular flow standard leak elements for vacuum technology applications in this paper. The nanofluidic chips are fabricated by MEMS technologies while the macro-micro connection is achieved using glass fusion bonding and standard Swagelok (R) Fitting. It is found that the choice of annealing temperature and holding time is a key issue regarding fusion bonding and the optimal processing parameters are 780 degrees C, 5 min. Meanwhile, the sealing reliability of fusion bonding and the fitting connection is evaluated. Experiment shows that the flow conductance of the as-fabricated leak can reach 10(-13) m(3).s(-1) magnitude for He, N-2 and Ar. This standard leak has the advantages of controlled dimensions, reliable connection, and constant flow conductance over a range of 10(5) Pa.

• 单位
  中国科学院