A Fabry-Perot interferometer strain sensor composed of a rounded rectangular air cavity with a thin wall for high sensitivity and interference contrast

摘要

A Fabry-Perot interferometer (FPI) strain sensor with high sensitivity and interference contrast is designed and fabricated by a simple, cost effective, and safe process which can be scaled up for commercial production. The excellent strain sensitivity of 8 pm/mu e and interference contrast of 25 dB stem from the special structure with the unique air cavity, small wall thickness, and excellent reflection surface of the air cavity. The strain -temperature cross-sensitivity of the sensor is only 0.59 mu e/degrees C in the temperature range of 20-80 degrees C. The sensor has large potential in applications such as strain sensing.

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