On-Wafer Microrectangular Coaxial Delay Line by Using MEMS-Casting Process

作者：Dai, Xinfeng; Che, Wenquan^*; Gu, Jiebin; Feng, Wenjie

来源：IEEE Microwave and Wireless Components Letters, 2021, 31(5): 437-440.

DOI：10.1109/LMWC.2021.3063100

• Metals
• Delays
• Delay lines
• Prototypes
• Crystals
• Dielectric measurement
• Conductors
• Delay line
• MEMS-Casting (MEMS-C)
• microcoaxial
• microwave and millimeter-wave

In this work, a serpentine microrectangular coaxial delay line (MRCDL) operating from dc to Ka-band is realized based on MEMS-Casting (MEMS-C) process. As an emerging technology, the MEMS-C process provides a low-cost, rapid, and one-time prototyping approach for manufacturing the proposed MRCDL. Besides, the single-crystal quartz with low permittivity and low loss tangent is used to fill the MRCDL and supply high reliability. One prototype is fabricated for demonstration. The measured results show a maximum 2.42-dB loss in the 410-ps delay circumstance, with 23.5-ps delay flatness in the range of dc to Ka-band. Moreover, the loss characteristic is comparable to the Cu-based air-filled MRCDL in a similar electrical delay situation, due to the dramatically shortened physical length benefiting from the low-loss filled dielectric. Obviously, the proposed microrectangular coaxial line (MRCL) design indicates an interesting solution to microwave and millimeter-wave microdevices and systems.

• 单位
  南京理工大学