Influence of nitrogen doping on the thermal stability of hydrogenated amorphous diamond coating

作者：Peng, Jihua^*; Yang, Manzhong; Zeng, Jiwei; Su, Dongyi; Liao, Jingwen; Yick, Man-lung

来源：Thin Solid Films, 2020, 709: 138188.

DOI：10.1016/j.tsf.2020.138188

• Hydrogenated diamond coating
• Nitrogen doping
• Bonding structure
• Mechanical property

The nitrogen-doped hydrogenated diamond like coatings (a-C:H:N) with 0-3 at.% nitrogen content were deposited onto 316 L steel substrate by PECVD. The x-ray photoelectron spectroscope, Raman spectroscopy, and Fourier transformation infrared spectroscopy are used to study their bonding structure evolution during annealing. Effect of annealing on their hardness and residual stress is also evaluated by nano indenter and film stress instrument. It shows that the sp(3) fraction in a-C:H:N coatings contains lot of Nsp(3) and reaches the maximum around 0.12 at% N content. The a-C:H:N coating with 2.95 at.% N can keep high sp(3) fraction and high hardness 12.4 GPa even after annealed at 590 degrees C.

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