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Low-loss fiber-to-chip edge coupler for silicon nitride integrated circuits

ZHU, X. I. A. O. T. I. A. N.; LI, G. U. A. N. G. K. U. O.; WANG, X. I. A. N. G.; LI, Y. U. H. U. A.; DAVIDSON, R. O. Y.; LITTLE, B. R. E. N. T. E.; CHU, S. A. I. T.*
Science Citation Index Expanded
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摘要

Silicon nitride (SiN) integrated optical waveguides have found a wide range of applications due to their low loss, broad wavelength transmission band and high nonlinearity. However, the large mode mismatch between the single-mode fiber and the SiN waveguide creates a challenge of fiber coupling to these waveguides. Here, we propose a coupling approach between fiber and SiN waveguides by utilizing the high-index doped silica glass (HDSG) waveguide as the intermediary to smooth out the mode transition. We achieved fiber-to-SiN waveguide coupling efficiency of lower than 0.8 dB/facet across the full C and L bands with high fabrication and alignment tolerances.

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