Thermal oxidation of AlGaN nanowires for sub-250 nm deep ultraviolet photodetection

作者:Xiaodong Zhang; Xiaodong Zhang; Tao He; Wenbo Tang; Yongjian Ma; Xing Wei; Danhao Wang; Haochen Zhang; Haiding Sun; Yaming Fan; Yong Cai; Baoshun Zhang
来源:Journal of Physics D - Applied Physics, 2020, 53(49): 495105 (6pp).
DOI:10.1088/1361-6463/abb552