Optimization of a 2-DOF micro-positioning stage using corrugated flexure units

摘要

This paper presents an analytical model that can be utilized in the design and optimization of a 2-DOF micro-positioning stage using corrugated flexure (CF) units. Stiffness components of the CF beam and the middle stage of CF stage are derived through stiffness matrix method. Numerical simulations indicate smaller length of straight segment, smaller thickness and larger number of CF units are better for maximizing the off-axis/axial stiffness ratio. Further, the dimensions of CF stage have been optimized, leading to a CF stage with higher off-axis/axial stiffness ratio and larger range of motion. The optimal result is validated by the finite element analysis (FEA) and experiments.

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