Ultra-high Q lithium niobate microring monolithically fabricated by photolithography assisted chemo-mechanical etching

作者：Li, Chuntao; Guan, Jianglin; Lin, Jintian; Gao, Renhong; Wang, Min; Qiao, Lingling; Deng, Li; Cheng, Ya^*

来源：Optics Express, 2023, 31(19): 31556-31562.

DOI：10.1364/OE.498086

As one of the element photonic structures, the state-of-the-art thin-film lithium niobate (TFLN) microrings reach an intrinsic quality (Q) factor higher than 10(7). However, it is difficult to maintain such high-Q factors when monolithically integrated with bus waveguides. Here, a relatively narrow gap of an ultra-high Q monolithically integrated microring is achieved with 3.8 mu m, and a high temperature annealing is carried out to improve the loaded (intrinsic) Q factor with 4.29 x 10(6) (4.04 x 10(7)), leading to an ultra-low propagation loss of less than 1 dB/m, which is approximately 3 times better than the best values previously reported in ion-slicing TFLN platform.

• 单位
  中国科学院研究生院; y