Low-voltage driving linear piezoelectric motors having textured sliders of surface multi-connected vesicle-like microarray

摘要

Friction behavior and serious wear of the stator/slider pair are critical to restrict the development and commercialization of standing-wave linear ultrasonic motors. Owing to the effective friction regulation of laser surface microtextures, a multi-connected vesicle-like microarray consisting of the micropits and microgrooves was prepared on the slider surface. Finite element analysis at the microscale showed the proposed micro-textures were prone to cause the stator tip to sink, resulting in an increase of horizontal impact effect of ultrasonic vibration and the alternately regulating of static-dynamic friction boundary, which enhances the tangential force and improves the driving effect. The experimental results approved that the composite microtextures combining the pits of 100 mu m and the grooves of 50 mu m are positive for friction drive and output performance enhancement. Specifically, the output power of the low-voltage driving linear piezoelectric motor with the complex texturing array is 66% higher than that of non-textured ones. This study provides a reliable approach to enhancing the friction-driving performance and operation stability of piezoelectric motors or actuators.

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