Flexible Solar-Blind Photodetectors Based on β-Ga2O3 Films Transferred by a Stamp-Based Printing Technique

作者：Zhou, Xin; Li, Ming; Zhang, Jinzhong; Shang, Liyan; Jiang, Kai; Li, Yawei; Zhu, Liangqing^*; Chu, Junhao; Hu, Zhigao^*

来源：IEEE Electron Device Letters, 2022, 43(11): 1921-1924.

DOI：10.1109/LED.2022.3207314

• beta-Ga2O3 films
• pulsed laser deposition
• stamp-based printing technique
• flexible solar-blind photodetectors

A stamp-based printing technique was applied to transfer the beta-Ga2O3 films grown by pulsed laser deposition (PLD) from Si substrates onto some flexible substrates, such as PET, PEN, and Pl. It is demonstrated that the beta-Ga2O3 -based flexible solar-blind photodetectors (SBPDs) exhibit brilliant optoelectrical performances with a low dark current of 1.7 pA at 10 V, a I-254nm/I-dark ratio of 1.2 x 10(3), rise (tau(r1) = 0.079 s and tau(r2) = 0.413 s) and decay (tau(d1) = 0.029 s and tau(d2) =0.316 s) times. In a further step, flexible imaging sensor arrays based on the beta-Ga2O3/PET were fabricated, which exhibit good imaging capability and resolution. Moreover, wearable UVC-alarms based on the beta-Ga2O3/PET were realized to monitor the UVC radiation in the environment in real time, which can be used in the COVID-19-related area.