Enhanced mechanical properties of CrN coatings by plasma immersion ion implantation and deposition

作者：Liu, Liangliang; Li, Tijun; Ruan, Qingdong; Li, Dan; Huang, Chao; Zhang, Xiaolin; Ma, Yinghe; Wu, Yuzheng; Wu, Zhongcan; Fu, Ricky K. Y.; Wu, Zhongzhen; Chu, Paul K.^*

来源：Ceramics International, 2023, 49(4): 6713-6719.

DOI：10.1016/j.ceramint.2022.10.215

• Crystal defects
• Ion energy
• CrN coatings
• Mechanical properties
• Plasma immersion ion implantation and
• deposition
• PIII&D

Crystal defects can enhance the properties of materials without changing the composition but introduction of high-density defects in coatings is challenging. Herein, plasma immersion ion implantation and deposition (PIII&D) is employed to produce high-density crystal defects in CrN coatings to improve the mechanical properties. PIII&D is demonstrated to introduce high-density point defects and stacking faults into the CrN coatings, especially at a bias exceeding 10 kV. The dislocation density significantly increased from 5.2 x 1014/m2 to 1.3 x 1017/m2. In addition, the covered area of defects increased from 30% to 75% with the ion implantation. As a result, the hardness increases significantly from 24.2 GPa to 35.6 GPa, while the fracture toughness is not compromised.

• 单位
  北京大学