Laser maskless fast patterning for multitype microsupercapacitors

作者：Yuan, Yongjiu; Li, Xin^*; Jiang, Lan^*; Liang, Misheng; Zhang, Xueqiang; Wu, Shouyu; Wu, Junrui; Tian, Mengyao; Zhao, Yang; Qu, Liangti

来源：Nature Communications, 2023, 14(1): 3967.

DOI：10.1038/s41467-023-39760-3

• FEMTOSECOND LASER
• GRAPHENE OXIDE
• PHASE
• TIO2
• SUPERCAPACITORS
• NANOSHEETS
• SURFACE
• FIBERS
• ARRAYS

Downsizing electrode architectures have significant potential for microscale energy storage devices. Asymmetric micro-supercapacitors play an essential role in various applications due to their high voltage window and energy density. However, efficient production and sophisticated miniaturization of asymmetric micro-supercapacitors remains challenging. Here, we develop a maskless ultrafast fabrication of multitype micron-sized (10 x 10 & mu;m(2)) micro-supercapacitors via temporally and spatially shaped femtosecond laser. MXene/1T-MoS2 can be integrated with laser-induced MXene-derived TiO2 and 1T-MoS2-derived MoO3 to generate over 6,000 symmetric micro-supercapacitors or 3,000 asymmetric micro-supercapacitors with high-resolution (200 nm) per minute. The asymmetric micro-supercapacitors can be integrated with other micro devices, thanks to the ultrahigh specific capacitance (220 mF cm(-2) and 1101 F cm(-3)), voltage windows in series (52 V), energy density (0.495 Wh cm(-3)) and power density (28 kW cm(-3)). Our approach enables the industrial manufacturing of multitype micro-supercapacitors and improves the feasibility and flexibility of micro-supercapacitors in practical applications. @@@ Miniature asymmetric supercapacitors have higher voltage and energy density but are often limited by a complex manufacturing process and difficulties in further miniaturization. Here, the authors demonstrate a maskless method for the patterned fabrication of submicron-scale symmetric and asymmetric supercapacitors.

• 单位
  北京理工大学; 清华大学