Structure and properties of a-C:H:Si:O films deposited by cage-like hollow cathode discharge on AZ31 alloy

摘要

To improve the surface properties and reduce the wear failure of Mg-based alloys, the a-C:H:Si:O coatings were prepared by hollow cathode discharge. The effects of the Si-O proportion on the structure and properties of the doped coatings were systematically investigated. The results show that the structure and properties of the film can be effectively regulated by Si-O doping. The grain size, surface roughness, I-D/I-G value, SP3/SP2 ratio, mechanical properties, adhesive properties and tribology behavior of the coated substrate changed with the variation of Si-O doping concentration. In addition, the formation of transfer film inhibits surface adhesion, reducing the friction force and improving the film's wear resistance. The wear mechanism and the friction model against the Al2O3 counterpart were also revealed. The doped films have greatly improved the surface properties of AZ31 and have broad prospects in wear resistance fields.

关键词