Development of a High-Precision and Low Cross-Axis Sensitivity 3-D Accelerometer for Low-Frequency Vibration Measurement

摘要

A new high-precision and low-frequency 3-D accelerometer that utilizes a symmetrical parallel vibration-sensing mechanism and a low cross-axis sensitivity high-precision 3-D sensing system is proposed in this study. The parameters of the vibration-sensing mechanism were determined by theoretical modeling and simulation analysis, and the performance of the 3-D accelerometer was tested experimentally. The dynamic response characteristics of the accelerometer were first determined using kinetic modeling, which showed reasonable amplitude-frequency and phase-frequency characteristics in the frequency range below 10 Hz. The accelerometer was calibrated using the comparison method. The sensitivities of the accelerometer in X-, Y-, and Z-axes are 25.3, 25.3, and 21.1 V/g, respectively, with a cross-axis sensitivity of less than 1%. The resolutions of the accelerometer in the X-, Y-, and Z-axes were 48, 45, and 50 mu g, respectively. The proposed accelerometer with high sensitivity and high resolution can be widely used for low-frequency microvibration measurements in engineering applications.

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