科研之友
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摘要
Implantable bioelectronics provide unprecedented opportunities for real-time and continuous monitoring of physiological signals of living bodies. Most bioelectronics adopt thin-film substrates such as polyimide and pol-ydimethylsiloxane that exhibit high levels of flexibility and stretchability. However, the low permeability and relatively high modulus of these thin films hamper the long-term biocompatibility. In contrast, devices fabricat-ed on porous substrates show the advantages of high permeability but suffer from low patterning density. Here, we report a wafer-scale patternable strategy for the high-resolution fabrication of supersoft, stretchable, and permeable liquid metal microelectrodes (mu LMEs). We demonstrate 2-mu m patterning capability, or an ultrahigh density of similar to 75,500 electrodes/cm(2), of mu LME arrays on a wafer-size (diameter, 100 mm) elastic fiber mat by pho-tolithography. We implant the mu LME array as a neural interface for high spatiotemporal mapping and interven-tion of electrocorticography signals of living rats. The implanted mu LMEs have chronic biocompatibility over a period of eight months.
