Memsensor-Integrated Microrobots for Passive Detection of H2O2

作者：Yu, Zejie; Wang, Kun; Hou, Chaojian^*; Chen, Donglei; Wang, Shuideng; Zhang, Wenqi; Qu, Zhi; Wang, Xiaokai; Dong, Lixin^*

来源：IEEE/ASME Transactions on Mechatronics, 2023.

DOI：10.1109/TMECH.2023.3321758

• Robot sensing systems
• Sensors
• Magnetic resonance imaging
• Immune system
• Electrodes
• Fabrication
• Calibration
• Hydrogen peroxide
• memsensor
• microrobot
• molybdenum disulfide
• passive sensor

A memsensor (a memory sensor) is designed as a sensor with/in memory, which can work in a passive mode and, hence, is particularly suitable for environments where a local/onboard power supply is hardly available for such a scenario: the microrobot will carry such sensors and move to a specific region where the physical quantities of interest are in the intermediate range. The sensors will be collected back with the robot to understand the information about the location where they have been staying. In this report, molybdenum disulfide (MoS2) memsensors are integrated on microrobots for hydrogen peroxide (H2O2) detection in a passive mode. The sensing is based on the reactivity of a MoS2 nanoflake to H2O2, which is an indicator of the existence of tumor cells in their microenvironment. The sensor has a crossbar configuration and is microfabricated with Au/MoS2/Au. Due to its irreversible structure, calibration is done at a lower concentration of H2O2 and confirmed at a higher one while the effective sensing range is in between. Experiments show that the proposed calibration and sensing method has an acceptable resolution of 200 nmol/L to 2 mu mol/L. Compatibility of the fabrication processes of the sensors to that of helical magnetic microrobots is excellent based on the first trial.