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Wafer-Scale, Highly-Ordered Silicon Nanowires Produced by Step-and-Flash Imprint Lithography and Metal-Assisted Chemical Etching
Authors:Jian-Wei Ho
Source:
MRS Proceedings
, 2012, 1512.
DOI:10.1557/opl.2012.1663
Institution
1; National university of Singapore; the National University of Singapore
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