Wafer-Scale, Highly-Ordered Silicon Nanowires Produced by Step-and-Flash Imprint Lithography and Metal-Assisted Chemical Etching

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Authors：Jian-Wei Ho

Source：MRS Proceedings, 2012, 1512.

DOI：10.1557/opl.2012.1663

Institution
1; National university of Singapore; the National University of Singapore

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Update Date：2020-04-26 17:10

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