An alternative flat scanner and micropositioning method for scanning probe microscope

作者：Cai Wei; Shang Guangyi^*; Zhou Yusheng; Xu Ping; Yao Junen

来源：Review of Scientific Instruments, 2010, 81(12): 123701.

DOI：10.1063/1.3505781

An alternative flat scanner used for combining a scanning probe microscope with an inverted optical microscope is presented. The scanner has a novel structure basically consisting of eight identical piezoelectric tubes, metal flexure beams, and one sample mount. Because of the specially designed structure, the scanner is able to carry a sample of more than 120 g during imaging. By applying voltages of +/- 150 V, scanning range of more than 30 mu m in three dimensions can be achieved. To improve the reliability of the stick-slip motion, a new method for sample micropositioning is proposed by applying a pulsed voltage to the piezotubes to produce a motion in the z-axis. Reliable translation of the sample has been thus accomplished with the step length from similar to 700 nm to 9 mu m over a range of several millimeters. A homemade scanning probe microscope-inverted optical microscope system based on the scanner is described. Experimental results obtained with the system are shown.

• 单位
  北京航空航天大学