Lithium niobate microring with ultra-high Q factor above 108

作者：Gao, Renhong; Yao, Ni; Guan, Jianglin; Deng, Li; Lin, Jintian^*; Wang, Min; Qiao, Lingling; Fang, Wei; Cheng, Ya^*

来源：Chinese Optics Letters, 2022, 20(1): 011902.

DOI：10.3788/COL202220.011902

• lithium niobate
• microcavities
• waveguide

We demonstrate integrated lithium niobate (LN) microring resonators with Q factors close to the intrinsic material absorption limit of LN. The microrings are fabricated on pristine LN thin-film wafers thinned from LN bulk via chemo-mechanical etching without ion slicing and ion etching. A record-high Q factor up to 108 at the wavelength of 1550 nm is achieved because of the ultra-smooth interface of the microrings and the absence of ion-induced lattice damage, indicating an ultra-low waveguide propagation loss of similar to 0.0034 dB=cm. The ultra-high Q microrings will pave the way for integrated quantum light source, frequency comb generation, and nonlinear optical processes.

• 单位
  中国科学院研究生院; 浙江大学; y